Our Mission
HQ-Dielectrics® GmbH is committed to the continuous development and production of current and future leading-edge process equipment for high-quality dielectrics for our customers in micro- and nanotechnology. We offer dielectrics technology innovations to help our customers succeed.
(back to top)History
| 2009: | HQ-Dielectrics® was founded as a privately owned technology company with main focus on semiconductor and photovoltaic industry |
| 2010: | Funding by innovations award from the Free State of Bavaria |
| Various Patents on plasma sticks and technology issued | |
First EU project started  | |
| 2011: | Various innovation coupons from Baden-Württemberg for extraordinary innovations in the fields of temperature measurement and production systems for the semiconductors industry |
| Shipment of first plasma oxidation process module | |
| 2012: | Shipment of first fully automated 300 mm plasma oxidation system with atmospheric handling |
| 2013: | First shipment of 2.7 µm pyrometers |
European project SEA4KET kick-off  | |
| 2014: | Shipment of first RTP system, co-developed by HQ-D |
| 2015: | Shipment of first thermopile based pyrometer |
ECSEL Joint Undertaking project WAYTOGO FAST funding acceptance through Horizon 2020 and project start  | |
| 2016: | First manual HemeraHT RTP system launched |
| 2017: | Follow up orders for HemeraHT RTP systems |
| 2018: | ECSEL Joint Undertaking project REACTION funding acceptance through Horizon 2020 and project start: First European 200 mm SiC pilot line |
| 2019: | High Temperature Diamond Annealing Sytem (Diamond Cube) launched |
| 2020: | First HemeraHT & HyperionLT Hybrid System order |