Technology
| 2013: | Presentation at the EMRS conference on plasma oxidation |
| 2013: | SemiCon Europa: Presentation at the 450 mm Session |
| 2014: | SemiCon Europa: Poster at the EEMI450 booth on scaling to 450 mm |
| 2014: | Presentation at the APCM Conference |
| 2015: | German RTP users group meeting – presentation on plasma oxidation of silicon carbide |
| 2016: | ECS conference in San Diego - presentation on low-temperature microwave-based plasma oxidation of Ge and oxidation of silicon followed by plasma oxidation |
| Presentation at the Wodim conference in Catania on oxidation of Germanium at low-temperature by plasma enhanced processing | |
| SISPAD in Nürnberg - presentation on equipment simulation for studying the growth rate and its uniformity of oxide layers deposited by plasma-enhanced oxidation | |
| 2017: | INFOS conference in Potsdam - presentation on High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation |
| 2019: | SemiCon Europa: Presentation on RTP Requirements and Challenges in MEMS Manufacturing |
Data Sheets
- 003350_23-Pyrometer_2016-06-09
- 003350_27-Pyrometer_2014-0925
- 003580-Thermopile_2015-01-19
- 003540b-Plasmastick-V3b
- 003620-Plasma-Sensor
- 003715-Befestigung Sichtglas Pyro
- PN1008 TEC Amp
- Further datasheets and manuals upon request
Training
Overview on RTP Course: “Theory and Practice” RTP training plans for managers, engineers, and for technicians Personalized training plans
Presentations, data sheets, training plans and more information are available upon request: info(at)hq‑dielectrics.eu (Contact)